MKS instruments, components and subsystems incorporate sophisticated technologiesto power, measure, control and monitor increasingly complex gas-related manufacturingprocesses, thereby enhancing the customers' uptime, yield and throughput, andimproving their productivity and return on invested capital.

MKS Best in Class products and technologies provide infrastructure to:

• Manage flow rates of gases entering and exiting the process chamber
• Measure and control mixture and pressure of gases within the process
• Analyze and monitor gas composition
• Isolate the process environment from the outside environment
• Deliver plasma source power to the process
• Create reactive gases for processing or for chamber cleaning
• Facilitate digital communications among sensors, subsystems, and control systems
• Analyze and monitor feed, exhaust and stack gases
• Calibrate instrumentation to ensure process repeatability
• Combine products into application-specific subsystems

Instruments & Control Systems Product Group
This group manufactures a wide range of products in the areas of Pressure Measurement & Control,Flow Measurement & Control, Leak Detection, Calibration, Gas Analysis,and Control & Information Technologies.

MKS Pressure Measurement & Control Products in Andover, Massachusettsmanufactures Baratron® process capacitance manometers and gas deliverypressure transducers; upstream and downstream and self-tuning pressure controllers;and butterfly, throttling poppet and pendulum pressure control valves.

MKS Flow Measurement & Control Products in Methuen, Massachusetts manufacturesMass-Flo® and ALTA™ gas phase mass flow meters and controllers; productsfor the precise delivery of gases, vapor, and liquids; and application-specificintegrated solutions to lower your cost, reduce complexity, increase performanceand improve process productivity.

MKS PICO® leak detectors, manufactured in Methuen, Massachusetts, areportable mass spec-based helium leak detectors which are the smallest and lightestin the world. Weighing less than 17 pounds, the PICO series of sniffing-styleand vacuum leak detectors set a new standard for portable leak detection.

MKS CalStand® calibration systems, used by many ISO 9000 Certified companiesto ensure that they continue to meet these International Quality Standards,are manufactured in Methuen, Massachusetts. You can choose from portable pressurecalibrators and portable flow calibrators for ease of movement around the fab,or a system to meet the needs of your metrology laboratory. In addition, MKSoffers calibration services at a number of locations around the world to ensurethe quality and accuracy of vacuum, pressure and flow instruments.

MKS provides sophisticated measurement technologies to monitor and controladvanced manufacturing processes in various industries. MKS Spectra™ products(formerly Spectra International) include component residual gas analyzers (RGAs),analytical equipment and in situ process monitoring instruments. All productsare manufactured in Crewe, U.K. and are sold as fully integrated, application-specificpackages. MKS’s commitment to in situ sensors includes full on-site globalproduct support with guaranteed Return On Investment (ROI). MKS also designsand manufactures an advanced range of On-Line™ (formerly On-Line Technologies)gas analysis products based on proprietary Fourier Transform Infrared (FTIR)spectrometry for the continuous monitoring of process feed, exhaust and stackgases.

The MKS Control & Information Technologies in Santa Clara, Californiaenables customers to more completely monitor and analyze, and more preciselycontrol, the process chamber environment by integrating critical process components,technologies and data around the process chamber. MKS process controllers collectdata on the process chamber environment by connecting through digital processcontrol network products to the instruments, components and subsystems surroundingthe chamber. With the addition of sophisticated connectivity hardware and software,MKS can enable the distribution of that process data in real time across thefactory network.

Vacuum Products Group
MKS HPS® Products in Boulder, Colorado manufactures HPS vacuum componentsand valves in a wide variety of standard sizes and configurations; a broadrange of high vacuum gauges that utilize Pirani, convection Pirani, piezo,hot cathode, cold cathode and MEMS-based multi-sensor technologies; and EffluentManagement Subsystems™ for manufacturing productivity enhancement, utilizingHPS vacuum pumping line heaters and traps.

HPS Products also offers a line of clamp fittings and buttweld componentsdesigned and manufactured for the biotechnology and pharmaceutical processingindustries. These components can be used in any liquid flow process or highpurity utility application where cleanability, sterility, dimensional integrity,and materials of construction are critical.

Power & Reactive Gas Products Group
MKS in Wilmington, Massachusetts manufactures innovative solutions for plasma,power, and reactive gases. The extensive product portfolio includes ASTeX® reactivegas generators and subsystems such as the ASTRON® Remote Plasma Source;the Semozon® and Liquozon® Ozone generators for CVD and advanced cleaningapplications; and microwave plasma sources and subsystems. Products are soldas individual components or as complete, integrated turnkey systems that meetstringent customer requirements.

MKS in Rochester, New York manufactures ENI® RF power supplies for semiconductorand other thin film processing applications, and DC power supplies for IC,storage media, flat panel display manufacturing, and other vacuum coating applications.The ENI product portfolio also includes impedance matching networks and plasmametrology products.

MKS Telvac Engineering in Telford, U.K. manufactures complex vacuum subsystemsand offers design and manufacturing outsourcing to OEMs.