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Message No. 22618, Started by eyalgrin on 06/05/17

Hi

We want to design a PECVD chamber and  We will glad for some tips:

-  Recommended Material of the chamber.

- Chambers shape.

-  Distance between the electrodes.

- Diameter of gas pipes.

- Recommended Power supply.

- Positioning furnace in the chamber

Thank you

Eyal and Andrey.

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Follow-up Messages (1)
Do Google search    https://www.google.com.ar/search?q=PECVD+ch...
No. 22642, Posted by devitg on 06/28/17, 09:24 PST.
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