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Author: eyalgrin
Time: 06/05/17 08:54 PST
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Current Topic:
PECVD Chamber

Hi

We want to design a PECVD chamber and  We will glad for some tips:

-  Recommended Material of the chamber.

- Chambers shape.

-  Distance between the electrodes.

- Diameter of gas pipes.

- Recommended Power supply.

- Positioning furnace in the chamber

Thank you

Eyal and Andrey.

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